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rfmems
- these pdf gives introduction to mems devices used in rf field
MEMS-based-spectrometer
- 一种基于MEMS技术的光谱仪系统介绍及发展情况介绍。-Introduce a systematic introduction and development of MEMS-based spectrometer.
Science-and-Technology
- 仪器科学与技术概论MEMS惯性传感器等四位教授专题讲座报告-Instrument Science and Technology Introduction to MEMS inertial sensors report of four professors lectures